Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Conferences

Influence of Focus Variation on Linewidth Measurements

Author(s)
M Tanaka, John S. Villarrubia, Andras Vladar
The influence of spatial resolution on line width measurements in the critical dimension scanning electron microscope (CD-SEM) was investigated experimentally...

Interfacial Structure of Photoresist Thin Films in Developer Solutions

Author(s)
Vivek M. Prabhu, B D. Vogt, Wen-Li Wu, Jack F. Douglas, Sushil K. Satija, D M. Goldfarb, H Ito
The development step is critical to the fabrication of nanostructures in chemically amplified photoresist technology. With critical dimensions (CD) shrinking to...

Flame Extinguishment in a Cup-Burner Apparatus

Author(s)
F Takahashi, Gregory T. Linteris, V Katta
Unsteady extinguishment phenomena of laminar methane-air co-flow diffusion flames formed in a cup-burner apparatus at normal earth gravity have been studied...

Characterizing the Risks and Costs of BGP Insecurity/Security

Author(s)
Douglas Montgomery, Kotikalapudi Sriram, Oliver Borchert, Okhee Kim, D. Richard Kuhn
We examine the performance of multimodal biometric authentication systems using state-of-the-art Commercial Off-the-Shelf (COTS) fingerprint and face biometric...
Was this page helpful?