Impact and Customers:
- The semiconductor microelectronics industry is a $250B worldwide market with 9% cumulative annual growth rate (CAGR) and 46 % US market share. The MEMS industry is a $50B worldwide market with 12 % CAGR and 41 % US share.
- Measurement of stress distributions around transistors in semiconductor devices will enable optimized processing of nano-scale engineered "stressors," which increase carrier mobility and thus device speed.
- Stress field measurements in MEMS and NEMS devices will enable lifetime-limiting defects to be identified and hence processing to be optimized to increase device reliability.
- NIST is working with semiconductor and MEMS manufacturers (e.g., Intel, Qualcomm), and deposition and measurement tool vendors (e.g., Novellus, Ultratech) to develop measurement methods and standards for nano-scale stress measurement.