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Accuracy and Resolution of Nanoscale Strain Measurement Techniques

Published

Author(s)

William A. Osborn, Lawrence H. Friedman, Mark D. Vaudin, Stephan J. Stranick, Michael S. Gaither, Justin M. Gorham, Victor H. Vartanian, Robert F. Cook
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD

Keywords

Strain Measurement, Stress Measurement, CRM, EBSD, XRD, SiGe, Reference Material
Created March 26, 2013, Updated February 19, 2017