@conference{23576,
  author = {William Osborn and Lawrence Friedman and Mark Vaudin and Stephan Stranick and Michael Gaither and Justin Gorham and Victor Vartanian and Robert Cook},
  title = {Accuracy and Resolution of Nanoscale Strain Measurement Techniques},
  year = {2013},
  month = {2013-03-26},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD},
  language = {en},
}