TY  - CONF
AU  - William Osborn
AU  - Lawrence Friedman
AU  - Mark Vaudin
AU  - Stephan Stranick
AU  - Michael Gaither
AU  - Justin Gorham
AU  - Victor Vartanian
AU  - Robert Cook
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-03-26
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Accuracy and Resolution of Nanoscale Strain Measurement Techniques
ER  -