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Mark McLean (Fed)

Materials Research Engineer

Research Interests

  • In-situ micro/nano-mechanical test techniques
  • Fabrication of micro/nano-scale devices
  • Atom probe tomography

Publications

Wavelength-Dependent Field Ion Emission in Atom Probe Tomography

Author(s)
Ann Debay, Benjamin Caplins, Karen DeRocher, Jacob Garcia, May Martin, Mark McLean, Christopher Mead, Luis Miaja Avila, William Osborn, Xiaochen Ren, Norman Sanford
Laser-pulsed atom probe tomography (APT) is a powerful tool for materials characterization due to its desirable combination of high spatial resolution and...

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

Author(s)
John Diulus, Carles Corbella Roca, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William Osborn, James Maslar, Andrei Kolmakov
This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for the rapid (sub-100 ms response time) and sensitive detection...
View more Publications

Data and Software Publications

Created October 9, 2019, Updated December 8, 2022
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