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News and Updates

Industry Impacts

Nanolithography Design Tools

Accurate production of nanoscale features on semiconductor chips is essential to their performance, but typical design tools cater to the dominance of straight

Projects and Programs

Polymers for Next-Generation Lithography

Completed
Our goal is to develop measurement methods with sufficiently high spatial resolution to uncover the materials limitations in the resolution of state-of-the-art

Metrology for Nanoimprint Lithography

Completed
Our goal is to develop, advance, and demonstrate measurements that facilitate Nanoimprint Lithography (NIL) as a viable technology for the patterning of robust

Publications

Probing Electrified Liquid-Solid Interfaces with Scanning Electron Microscopy

Author(s)
Hongxuan Guo, Alexander Yulaev, Evgheni Strelcov, Alexander Tselev, Christopher M. Arble, Andras Vladar, John S. Villarrubia, Andrei Kolmakov
The mean free path of secondary electrons in aqueous solutions is on the order of a nanometer, making them a suitable probe of ultrathin electrical double

Tools and Instruments