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Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining

Published

Author(s)

Andrew Madison, John S. Villarrubia, Kuo-Tang Liao, Craig R. Copeland, Joshua Schumacher, Kerry Siebein, Robert Ilic, James Alexander Liddle, Samuel M. Stavis
Citation
Advanced Functional Materials
Volume
32
Issue
38

Citation

Madison, A. , Villarrubia, J. , Liao, K. , Copeland, C. , Schumacher, J. , Siebein, K. , Ilic, R. , Liddle, J. and Stavis, S. (2022), Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining, Advanced Functional Materials, [online], https://doi.org/10.1002/adfm.202111840 (Accessed April 18, 2024)
Created August 21, 2022, Updated September 21, 2022