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PUBLICATIONS

Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining

Published

Author(s)

Andrew Madison, John Villarrubia, Kuo-Tang Liao, Craig Copeland, Joshua Schumacher, Kerry Siebein, Robert Ilic, James Liddle, Samuel Stavis
Citation
Advanced Functional Materials
Volume
32
Issue
38
Pub Type
Journals

Download Paper

https://doi.org/10.1002/adfm.202111840
Local Download
Statistical analysis, Semiconductors, Process measurement and control, Process improvement, Nanometrology, Mechanical properties, Machining, Lithography, Image and signal processing, Dimensional metrology and Composition and structure

Citation

Madison, A. , Villarrubia, J. , Liao, K. , Copeland, C. , Schumacher, J. , Siebein, K. , Ilic, R. , Liddle, J. and Stavis, S. (2022), Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining, Advanced Functional Materials, [online], https://doi.org/10.1002/adfm.202111840 , https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929024 (Accessed October 15, 2025)

Issues

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Created August 21, 2022, Updated September 29, 2025
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