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PUBLICATIONS

Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining

Published

Author(s)

Andrew Madison, John S. Villarrubia, Kuo-Tang Liao, Craig R. Copeland, Joshua Schumacher, Kerry Siebein, Robert Ilic, James Alexander Liddle, Samuel M. Stavis
Citation
Advanced Functional Materials
Volume
32
Issue
38
Pub Type
Journals

Download Paper

DOI Link
Statistical analysis, Semiconductors, Process measurement and control, Process improvement, Nanometrology, Mechanical properties, Machining, Lithography, Image and signal processing, Dimensional metrology and Composition and structure

Citation

Madison, A. , Villarrubia, J. , Liao, K. , Copeland, C. , Schumacher, J. , Siebein, K. , Ilic, R. , Liddle, J. and Stavis, S. (2022), Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining, Advanced Functional Materials, [online], https://doi.org/10.1002/adfm.202111840 (Accessed April 17, 2024)

Created August 21, 2022, Updated September 21, 2022