@article{1291751,
  author = {Andrew Madison and John Villarrubia and Kuo-Tang Liao and Craig Copeland and Joshua Schumacher and Kerry Siebein and Robert Ilic and James Liddle and Samuel Stavis},
  title = {Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining},
  year = {2022},
  number = {32},
  month = {2022-08-21 04:08:00},
  publisher = {Advanced Functional Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929024},
  doi = {https://doi.org/10.1002/adfm.202111840 },
  language = {en},
}