TY  - JOUR
AU  - Madison, Andrew
AU  - Villarrubia, John
AU  - Liao, Kuo-Tang
AU  - Copeland, Craig
AU  - Schumacher, Joshua
AU  - Siebein, Kerry
AU  - Ilic, Robert
AU  - Liddle, James
AU  - Stavis, Samuel
C2  - Advanced Functional Materials
DA  - 2022-08-21 04:08:00
DO  - https://doi.org/10.1002/adfm.202111840 
LA  - en
M1  - 32
PB  - Advanced Functional Materials
PY  - 2022
TI  - Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929024
ER  -