Publications

Displaying 51 - 75 of 85

Actuation of higher harmonics in large arrays of micromechanical cantilevers for expanded resonant peak separation

April 26, 2018

Author(s)

Nir Dick, Scott Grutzik, Christopher B. Wallin, Robert Ilic, Slava Krylov, Alan Zehnder

A large array of elastically coupled micro cantilevers of variable length is studied experimentally and numerically. Full-scale finite element modal analysis is implemented to determine the spectral behavior of the array and to extract a global coupling

Resonant Pressure Sensing Using a Micromechanical Cantilever Actuated by Fringing Electrostatic Fields

April 26, 2018

Author(s)

Naftaly Krakover, Robert Ilic, Slava Krylov

We demonstrate a pressure sensing approach based on the resonant operation of a single crystal Si cantilever positioned near a flexible, pressurized membrane. The membrane deflection perturbs the electrostatic force acting on the cantilever and

Topological quantization of energy transport in micromechanical and nanomechanical lattices

March 21, 2018

Author(s)

Chih-Chun Chien, Kirill Velizhanin, Yonatan Dubi, Robert Ilic, Michael P. Zwolak

Topological effects are emerging as one of the central paradigms of physics, from condensed matter to cold atoms to quantum computation. These effects are typically discussed in the context of quantum physics. Here, we demonstrate the role of topology in

In Situ Observation of Carbon Nanotube Layer Growth on Microbolometers with Substrates at Ambient Temperature

March 20, 2018

Author(s)

Vojtech Svatos, Imrich Gablech, Robert Ilic, Jan Pekarek, Pavel Neuzil

Carbon nanotubes (CNTs) have near unity infrared (IR) absorption efficiency, making them extremely attractive in IR imaging devices. Since CNT growth occurs at elevated temperatures, integration of CNTs with IR imaging devices is challenging and has not

Aperture Arrays for Subnanometer Calibration of Optical Microscopes

September 28, 2017

Author(s)

Craig Copeland, Craig McGray, Jon Geist, James Alexander Liddle, Robert Ilic, Samuel Stavis

We fabricate and test subresolution aperture arrays as calibration devices for optical localization microscopy. An array pitch with a relative uncertainty of approximately three parts in ten thousand enables magnification calibration with subnanometer

Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

August 16, 2017

Author(s)

Lior Medina, Rivka Gilat, Robert Ilic, Slava Krylov

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic and switching. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical

Parametric amplification of acoustically-excited micromechanical oscillators using fringing electrostatic fields

June 16, 2017

Author(s)

Lulinski Stella, Shmilovich Tsvi, Robert Ilic, Slava Krylov

We present an experimental demonstration of parametric amplification of acoustically-excited bulk micromachined single-crystal silicon cantilevers. We used electrostatic actuation by fringing fields for the parametric pumping of vibrational oscillations

Acousto-optic modulation and opto-acoustic gating in piezo-optomechanical circuits

February 9, 2017

Author(s)

Krishna Coimbatore Balram, Marcelo I. Davanco, Robert Ilic, Ji-Hoon Kyhm, Jin Dong Song, Kartik Srinivasan

Stably accessing octave-spanning microresonator frequency combs in the soliton regime

February 2, 2017

Author(s)

Qing Li, Travis Briles, Daron Westly, Tara E. Drake, Jordan Stone, Robert Ilic, Scott Diddams, Scott Papp, Kartik Srinivasan

Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

January 21, 2017

Author(s)

Lior Medina, Rivka Gilat, B. Robert Ilic, Slava Krylov

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge

Nanolithography Toolbox

October 19, 2016

Author(s)

Bojan R. Ilic, Krishna Coimbatore Balram, Daron A. Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Neal A. Bertrand, Samuel M. Stavis, Vladimir A. Aksyuk, James A. Liddle, Brian A. Bryce, Nicolae Lobontiu, Yuxiang Liu, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Pavel Neuzil, Vojtech Svatos, Slava Krylov, Christopher B. Wallin, Ian J. Gilbert, Kristen A. Dill, Richard J. Kasica, Kartik A. Srinivasan, Gregory Simelgor, Juraj Topolancik

The Nanolithography Toolbox

October 19, 2016

Author(s)

Krishna Coimbatore Balram, Daron Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Richard Kasica, Christopher B. Wallin, Ian J. Gilbert, Brian A. Bryce, Gregory Simelgor, Juraj Topolancik, Nicolae Lobontiu, Yuxiang Liu, Pavel Neuzil, Vojtech Svatos, Kristen A. Dill, Neal A. Bertrand, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Kartik Srinivasan, Samuel Stavis, Vladimir Aksyuk, James Alexander Liddle, Slava Krylov, Robert Ilic

This article describes a platform-independent software package for scripted lithography pattern layout generation and complex processing. The Nanolithography Toolbox, developed at the Center for Nanoscale Science and Technology (CNST) at the National

Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams

September 29, 2016

Author(s)

Naftaly Krakover, Robert Ilic, Slava Krylov

The ability to control nonlinear interactions of suspended mechanical structures offers a unique opportunity to engineer rich dynamical behavior that extends the dynamic range and ultimate device sensitivity. We demonstrate a displacement sensing technique

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