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PUBLICATIONS

Aperture Arrays for Subnanometer Calibration of Optical Microscopes

Published

Author(s)

Craig Copeland, Craig McGray, Jon Geist, James Alexander Liddle, Robert Ilic, Samuel Stavis

Abstract

We fabricate and test subresolution aperture arrays as calibration devices for optical localization microscopy. An array pitch with a relative uncertainty of approximately three parts in ten thousand enables magnification calibration with subnanometer accuracy.
Proceedings Title
2017 International Conference on Optical MEMS and Nanophotonics
Conference Dates
August 13-17, 2017
Conference Location
Santa Fe, NM, US
Conference Title
International Conference on Optical MEMS and Nanophotonics
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/OMN.2017.8051448
Local Download

Keywords

aperture, subnanometer, localization, microscopy
Reference materials, Optical / photometry / laser metrology, Nanophotonics and Nanometrology

Citation

Copeland, C. , McGray, C. , Geist, J. , Liddle, J. , Ilic, R. and Stavis, S. (2017), Aperture Arrays for Subnanometer Calibration of Optical Microscopes, 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US, [online], https://doi.org/10.1109/OMN.2017.8051448, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923834 (Accessed October 10, 2025)

Issues

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Created September 27, 2017, Updated October 12, 2021
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