@conference{801636,
  author = {Craig Copeland and Craig McGray and Jon Geist and James Liddle and Robert Ilic and Samuel Stavis},
  title = {Aperture Arrays for Subnanometer Calibration of Optical Microscopes},
  year = {2017},
  month = {2017-09-28 00:09:00},
  publisher = {2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923834},
  doi = {https://doi.org/10.1109/OMN.2017.8051448},
  language = {en},
}