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Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Published

Author(s)

Lior Medina, Rivka Gilat, B. Robert Ilic, Slava Krylov

Abstract

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self excitation.
Proceedings Title
The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)
Conference Dates
January 22-26, 2017
Conference Location
Las Vegas, NV, US

Keywords

Curved micro beam, Electrostatic actuation, Self-excitation, Bistability, MEMS/NEMS

Citation

Medina, L. , Gilat, R. , Ilic, B. and Krylov, S. (2017), Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load, The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, US, [online], https://doi.org/10.1109/MEMSYS.2017.7863525, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922256 (Accessed July 16, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 21, 2017, Updated April 6, 2022