Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Published

January 21, 2017

Author(s)

Lior Medina, Rivka Gilat, B. Robert Ilic, Slava Krylov

Abstract

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self excitation.

Proceedings Title

The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)

Conference Dates

January 22-26, 2017

Conference Location

Las Vegas, NV, US

Pub Type

Conferences

Download Paper

https://doi.org/10.1109/MEMSYS.2017.7863525

Local Download

Keywords

Curved micro beam, Electrostatic actuation, Self-excitation, Bistability, MEMS/NEMS

Citation

Medina, L. , Gilat, R. , Ilic, B. and Krylov, S. (2017), Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load, The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, US, [online], https://doi.org/10.1109/MEMSYS.2017.7863525, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922256 (Accessed October 7, 2024)