NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Published

Author(s)

Lior Medina, Rivka Gilat, B. Robert Ilic, Slava Krylov

Abstract

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self excitation.
Proceedings Title
The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)
Conference Dates
January 22-26, 2017
Conference Location
Las Vegas, NV, US
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/MEMSYS.2017.7863525
Local Download

Keywords

Curved micro beam, Electrostatic actuation, Self-excitation, Bistability, MEMS/NEMS
Nanotechnology and Nanomechanics

Citation

Medina, L. , Gilat, R. , Ilic, B. and Krylov, S. (2017), Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load, The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, US, [online], https://doi.org/10.1109/MEMSYS.2017.7863525, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922256 (Accessed October 17, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 21, 2017, Updated April 6, 2022
Was this page helpful?