Medina, L.
, Gilat, R.
, Ilic, B.
and Krylov, S.
(2017),
Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load, The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017), Las Vegas, NV, US, [online], https://doi.org/10.1109/MEMSYS.2017.7863525, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922256
(Accessed April 23, 2024)
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Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load
Published
Author(s)
Lior Medina, Rivka Gilat, , Slava Krylov
Abstract
We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self excitation.Proceedings Title
The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)
Conference Dates
January 22-26, 2017
Conference Location
Las Vegas, NV, US
Pub Type
Conferences
Download Paper
Keywords
Curved micro beam, Electrostatic actuation, Self-excitation, Bistability, MEMS/NEMS
Citation
Created January 21, 2017, Updated April 6, 2022