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Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

Published

Author(s)

Lior Medina, Rivka Gilat, Robert Ilic, Slava Krylov

Abstract

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic and switching. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical switch using a single electrode. The release of the mechanically-latched beam is achieved by pre-loading the structure using a relatively large voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt change results in dynamic snap-back of the beam. Our results show that a single electrode can switch multistable micro- and nano-electromechanical structures with several latching points.
Citation
Proceedings
Volume
1
Issue
4

Keywords

Curved micro beam, Electrostatic actuation, Dynamic release, Bistability, MEMS/NEMS

Citation

Medina, L. , Gilat, R. , Ilic, R. and Krylov, S. (2017), Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode, Proceedings, [online], https://doi.org/10.3390/proceedings1040277, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922113 (Accessed June 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 15, 2017, Updated October 12, 2021