Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

Published

August 16, 2017

Author(s)

Lior Medina, Rivka Gilat, Robert Ilic, Slava Krylov

Abstract

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic and switching. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical switch using a single electrode. The release of the mechanically-latched beam is achieved by pre-loading the structure using a relatively large voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt change results in dynamic snap-back of the beam. Our results show that a single electrode can switch multistable micro- and nano-electromechanical structures with several latching points.

Citation

Proceedings

Volume

1

Issue

4

Pub Type

Journals

Download Paper

https://doi.org/10.3390/proceedings1040277

Local Download

Keywords

Curved micro beam, Electrostatic actuation, Dynamic release, Bistability, MEMS/NEMS

Citation

Medina, L. , Gilat, R. , Ilic, R. and Krylov, S. (2017), Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode, Proceedings, [online], https://doi.org/10.3390/proceedings1040277, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922113 (Accessed April 19, 2024)