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Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode
Published
Author(s)
Lior Medina, Rivka Gilat, Robert Ilic, Slava Krylov
Abstract
Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic and switching. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical switch using a single electrode. The release of the mechanically-latched beam is achieved by pre-loading the structure using a relatively large voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt change results in dynamic snap-back of the beam. Our results show that a single electrode can switch multistable micro- and nano-electromechanical structures with several latching points.
Medina, L.
, Gilat, R.
, Ilic, R.
and Krylov, S.
(2017),
Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode, Proceedings, [online], https://doi.org/10.3390/proceedings1040277, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922113
(Accessed October 14, 2025)