Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanolithography Toolbox



Bojan R. Ilic, Krishna Coimbatore Balram, Daron A. Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Neal A. Bertrand, Samuel M. Stavis, Vladimir A. Aksyuk, James A. Liddle, Brian A. Bryce, Nicolae Lobontiu, Yuxiang Liu, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Pavel Neuzil, Vojtech Svatos, Slava Krylov, Christopher B. Wallin, Ian J. Gilbert, Kristen A. Dill, Richard J. Kasica, Kartik A. Srinivasan, Gregory Simelgor, Juraj Topolancik

Handbook (NIST HB) - 160
Report Number


CAD, optical and electron beam lithography, nanoscale design, nanoscale curved features


Ilic, B. , Balram, K. , Westly, D. , Davanco, M. , Grutter, K. , Ray, C. , Bertrand, N. , Stavis, S. , Aksyuk, V. , Liddle, J. , Bryce, B. , Wallin, C. , Gilbert, I. , Dill, K. , Kasica, R. and Srinivasan, K. (2016), Nanolithography Toolbox, Handbook (NIST HB), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed June 13, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created October 19, 2016, Updated April 1, 2020