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Nanolithography Toolbox

Published

Author(s)

Bojan R. Ilic, Krishna Coimbatore Balram, Daron A. Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Neal A. Bertrand, Samuel M. Stavis, Vladimir A. Aksyuk, James A. Liddle, Brian A. Bryce, Nicolae Lobontiu, Yuxiang Liu, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Pavel Neuzil, Vojtech Svatos, Slava Krylov, Christopher B. Wallin, Ian J. Gilbert, Kristen A. Dill, Richard J. Kasica, Kartik A. Srinivasan, Gregory Simelgor, Juraj Topolancik

Citation
Handbook (NIST HB) - 160
Report Number
160

Keywords

CAD, optical and electron beam lithography, nanoscale design, nanoscale curved features

Citation

Ilic, B. , Balram, K. , Westly, D. , Davanco, M. , Grutter, K. , Ray, C. , Bertrand, N. , Stavis, S. , Aksyuk, V. , Liddle, J. , Bryce, B. , Wallin, C. , Gilbert, I. , Dill, K. , Kasica, R. and Srinivasan, K. (2016), Nanolithography Toolbox, Handbook (NIST HB), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.HB.160 (Accessed June 15, 2021)
Created October 19, 2016, Updated April 1, 2020