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PUBLICATIONS

Nanolithography Toolbox

Published

Author(s)

Bojan R. Ilic, Krishna Coimbatore Balram, Daron A. Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Neal A. Bertrand, Samuel M. Stavis, Vladimir A. Aksyuk, James A. Liddle, Brian A. Bryce, Nicolae Lobontiu, Yuxiang Liu, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Pavel Neuzil, Vojtech Svatos, Slava Krylov, Christopher B. Wallin, Ian J. Gilbert, Kristen A. Dill, Richard J. Kasica, Kartik A. Srinivasan, Gregory Simelgor, Juraj Topolancik

Citation
Handbook (NIST HB) - 160
Report Number
160
NIST Pub Series
Handbook (NIST HB)
Pub Type
NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.HB.160

Keywords

CAD, optical and electron beam lithography, nanoscale design, nanoscale curved features
Nanotechnology and Lithography

Citation

Ilic, B. , Balram, K. , Westly, D. , Davanco, M. , Grutter, K. , Ray, C. , Bertrand, N. , Stavis, S. , Aksyuk, V. , Liddle, J. , Bryce, B. , Wallin, C. , Gilbert, I. , Dill, K. , Kasica, R. and Srinivasan, K. (2016), Nanolithography Toolbox, Handbook (NIST HB), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.HB.160 (Accessed October 9, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 19, 2016, Updated April 1, 2020
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