Nanolithography Toolbox

Published: October 19, 2016

Author(s)

Bojan R. Ilic, Krishna Coimbatore Balram, Daron A. Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Neal A. Bertrand, Samuel M. Stavis, Vladimir A. Aksyuk, James A. Liddle, Brian A. Bryce, Nicolae Lobontiu, Yuxiang Liu, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Pavel Neuzil, Vojtech Svatos, Slava Krylov, Christopher B. Wallin, Ian J. Gilbert, Kristen A. Dill, Richard J. Kasica, Kartik A. Srinivasan, Gregory Simelgor, Juraj Topolancik
Citation: Handbook (NIST HB) - 160
Report Number:
160
NIST Pub Series: Handbook (NIST HB)
Pub Type: NIST Pubs

Keywords

CAD, optical and electron beam lithography, nanoscale design, nanoscale curved features
Created October 19, 2016, Updated November 10, 2018