@misc{222046,
  author = {Bojan Ilic and Krishna Balram and Daron Westly and Marcelo Davanco and Karen Grutter and  and  and Christopher Ray and  and Neal Bertrand and Samuel Stavis and Vladimir Aksyuk and James Liddle and Brian Bryce and  and  and  and  and  and  and  and  and  and Christopher Wallin and Ian Gilbert and Kristen Dill and Richard Kasica and Kartik Srinivasan and  and },
  title = {Nanolithography Toolbox},
  year = {2016},
  month = {2016-10-19},
  publisher = {Handbook (NIST HB), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.HB.160},
  language = {en},
}