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Parametric amplification of acoustically-excited micromechanical oscillators using fringing electrostatic fields



Lulinski Stella, Shmilovich Tsvi, Bojan R. Ilic, Slava Krylov


We present an experimental demonstration of parametric amplification of acoustically-excited bulk micromachined single-crystal silicon cantilevers. We used electrostatic actuation by fringing fields for the parametric pumping of vibrational oscillations. The omnidirectional acoustic pressure served as a non-contact source for linear harmonic driving. We show that acoustic actuation is a convenient and versatile tool for dynamic characterization of micromechanical devices. This excitation method is suitable for wafer level dynamic testing, and could serve as an alternative to commonly used piezoelectric actuators. Our results suggest that this amplification approach may have applications in a wide variety of micromechanical devices, including resonant sensors, microphones and hearing aids.
Proceedings Title
9th European Nonlinear Dynamics Conference, ENOC 2017
Conference Dates
June 25-30, 2017
Conference Location
Budapest, NV


MEMS/NEMS, electrostatic actuation
Created June 16, 2017, Updated June 19, 2017