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Search Publications by: Steven Grantham (Fed)

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Displaying 101 - 125 of 132

40 Years of Metrology With Synchrotron Radiation at SURF

September 1, 2003
Author(s)
Uwe Arp, Steven E. Grantham, Simon G. Kaplan, Ping-Shine Shaw, Charles S. Tarrio, Robert E. Vest
the advantages of a compact synchrotron radiation source like the Synchrotron Ultraviolet Radiation Facility for metrology in the ultraviolet and extreme ultraviolet are shown. The capabilities of the different experimental stations are explained and

Response of a Silicon Photodiode to Pulsed Radiation

September 1, 2003
Author(s)
Robert E. Vest, Steven E. Grantham
Both the integrated-charge and peak-voltage responsivity of a 1 cm2 Si photodiode optimized for the extreme ultraviolet have been measured with 532 nm wavelength pulsed radiation. The peak power of the optical pulse is varied from 35 mW to 24 kW with a

Design and Performance of Capping Layers for EUV Multilayer Mirrors

June 1, 2003
Author(s)
Sasa Bajt, H N. Chapman, Nhan Nguyen, J Alameda, J C. Robinson, M Malinowski, E Gullikson, Andrew Aquila, Charles Tarrio, Steven Grantham
The reflectance stability of multilayer coatings for extreme ultraviolet lithography (EUVL) in a commercial tool environment is of utmost importance to ensure continuous exposures with minimum maintenance cost. We have made substantial progress in