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Search Publications by: Steven Grantham (Fed)

Displaying 126 - 132 of 132

Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology

January 1, 2002

Author(s)

Steven E. Grantham, Charles S. Tarrio, Thomas B. Lucatorto

Mass absorption coefficient of tungsten for 1600-2100 eV

January 1, 2002

Author(s)

Zachary H. Levine, Steven E. Grantham, I McNulty

Accurate pattern registration for integrated circuit tomography

January 1, 2001

Author(s)

Zachary H. Levine, Steven E. Grantham, S Neogi, S P. Frigo, I McNulty, C C. Retsch, Ying-ju Wang, Thomas B. Lucatorto

Extreme-Ultraviolet Metrology at SURF III,

January 1, 2001

Author(s)

Charles S. Tarrio, Robert E. Vest, Steven E. Grantham, Thomas B. Lucatorto