NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology
Published
Author(s)
Steven E. Grantham, Charles S. Tarrio, Thomas B. Lucatorto
Citation
Journal of Vacuum Science and Technology
Volume
20
Pub Type
Journals
Citation
Grantham, S.
, Tarrio, C.
and Lucatorto, T.
(2002),
Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology, Journal of Vacuum Science and Technology
(Accessed October 7, 2025)