TY  - JOUR
AU  - Steven Grantham
AU  - Charles Tarrio
AU  - Thomas Lucatorto
C2  - Journal of Vacuum Science and Technology
DA  - 2002-01-01
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology
PY  - 2002
TI  - Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology
ER  -