@article{145296,
  author = {Steven Grantham and Charles Tarrio and Thomas Lucatorto},
  title = {Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology},
  year = {2002},
  number = {20},
  month = {2002-01-01},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}