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Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

Published

Author(s)

Sasa Bajt, H N. Chapman, Nhan Nguyen, J Alameda, J C. Robinson, M E. Malinowski, Eric M. Gullikson, Andrew Aquila, Charles Tarrio, Steven Grantham
Citation
Applied Optics
Volume
42
Issue
28

Citation

Bajt, S. , Chapman, H. , Nguyen, N. , Alameda, J. , Robinson, J. , Malinowski, M. , Gullikson, E. , Aquila, A. , Tarrio, C. and Grantham, S. (2003), Design and performance of capping layers for extreme-ultraviolet multilayer mirrors, Applied Optics (Accessed April 14, 2024)
Created December 31, 2002, Updated October 12, 2021