@article{784986,
  author = {Sasa Bajt and H Chapman and Nhan Nguyen and J Alameda and J Robinson and M Malinowski and Eric Gullikson and Andrew Aquila and Charles Tarrio and Steven Grantham},
  title = {Design and performance of capping layers for extreme-ultraviolet multilayer mirrors},
  year = {2003},
  number = {42},
  month = {2003-01-01 00:01:00},
  publisher = {Applied Optics},
  language = {en},
}