Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Towards high accuracy reflectometry for extreme-ultraviolet lithography,

Published

Author(s)

Charles S. Tarrio, Steven E. Grantham, M B. Squires, Robert E. Vest, Thomas B. Lucatorto
Citation
Journal of Research of the National Institute of Standards and Technology
Volume
108

Citation

Tarrio, C. , Grantham, S. , Squires, M. , Vest, R. and Lucatorto, T. (2003), Towards high accuracy reflectometry for extreme-ultraviolet lithography,, Journal of Research of the National Institute of Standards and Technology (Accessed April 23, 2024)
Created January 1, 2003, Updated February 17, 2017