TY  - JOUR
AU  - Charles Tarrio
AU  - Steven Grantham
AU  - M Squires
AU  - Robert Vest
AU  - Thomas Lucatorto
C2  - Journal of Research of the National Institute of Standards and Technology
DA  - 2003-01-01
LA  - en
M1  - 108
PB  - Journal of Research of the National Institute of Standards and Technology
PY  - 2003
TI  - Towards high accuracy reflectometry for extreme-ultraviolet lithography,
ER  -