@article{144401,
  author = {Charles Tarrio and Steven Grantham and M Squires and Robert Vest and Thomas Lucatorto},
  title = {Towards high accuracy reflectometry for extreme-ultraviolet lithography,},
  year = {2003},
  number = {108},
  month = {2003-01-01},
  publisher = {Journal of Research of the National Institute of Standards and Technology},
  language = {en},
}