Levine, Z.
, Gao, J.
, Neogi, S.
, Levin, T.
, Scott, J.
and Grantham, S.
(2003),
Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope, Journal of Applied Physics
(Accessed April 25, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope
Published
Author(s)
, J J. Gao, S Neogi, T M. Levin, J H. Scott,
Citation
Journal of Applied Physics
Volume
93
Pub Type
Journals
Citation
Created January 1, 2003, Updated February 17, 2017