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Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope

Published

Author(s)

Zachary H. Levine, J J. Gao, S Neogi, T M. Levin, J H. Scott, Steven E. Grantham
Citation
Journal of Applied Physics
Volume
93

Citation

Levine, Z. , Gao, J. , Neogi, S. , Levin, T. , Scott, J. and Grantham, S. (2003), Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope, Journal of Applied Physics (Accessed May 27, 2024)

Issues

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Created January 1, 2003, Updated February 17, 2017