TY  - JOUR
AU  - Zachary Levine
AU  - J Gao
AU  - S Neogi
AU  - T Levin
AU  - J Scott
AU  - Steven Grantham
C2  - Journal of Applied Physics
DA  - 2003-01-01
LA  - en
M1  - 93
PB  - Journal of Applied Physics
PY  - 2003
TI  - Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope
ER  -