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Publications

Search Publications by Eric K. Lin

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Displaying 1 - 25 of 196

Photoresist latent and developer images as probed by neutron reflectivity methods

September 16, 2010
Author(s)
Vivek M. Prabhu, Shuhui Kang, David L. VanderHart, Eric K. Lin, Wen-Li Wu
Photoresist materials enable the fabrication of advanced integrated circuits with ever decreasing feature sizes. As next-generation light sources are developed, using extreme ultraviolet light of wavelength 13.5 nm, these highly-tuned formulations must

Thin Film Solid State Proton NMR Measurements Using A Synthetic Mica Substrate: Polymer Blends

August 25, 2009
Author(s)
David L. VanderHart, Vivek M. Prabhu, Kristopher Lavery, Cindi L. Dennis, Ashwin Rao, Eric K. Lin
We demonstrate that a synthetic fluorophlogopite mica can be used as a proton-free, diamagnetic substrate for examining solid thin-film samples using conventional solid-state proton nuclear magnetic resonance (NMR) experiments. The context of this work

Low-temperature plasma assisted nanotransfer printing between thermoplastic polymers

March 26, 2009
Author(s)
Deuk Y. Lee, Daniel R. Hines, Christopher M. Stafford, Christopher L. Soles, Eric K. Lin, Gottlieb Oehrlein
we performed a survey of the factors controlling the changes of the adhesion characteristics for PMMA and PET surfaces upon plasma activation of the respective interfaces for nanotransfer printing. Polar active functional groups introduced by plasma

Controlling the Formation and Orientation of Terraced Nanoscale Ribbons of a Thiophene-Based Copolymer

March 24, 2009
Author(s)
Dean M. DeLongchamp, Regis J. Kline, Youngsuk Jung, David Germack, Eric K. Lin, Andrew Moad, Lee J. Richter, Michael F. Toney, Martin Heeney, Iain McCulloch
Terraced nanoscale ribbon domains of a poly(2,5-bis(3-alkylthiophen-2-yl) thieno[3,2-b]thiophene) form after thin films are cooled from its highest-temperature phase. A simple flow coating procedure can induce high levels of ribbon orientation and even

Small Angle X-Ray Scattering Measurements of Spatial Dependent Linewidth in Dense Nanoline Gratings

March 16, 2009
Author(s)
Chengqing C. Wang, Wei-En Fu, Bin Li, Huai Huang, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, Paul S. Ho, Michael W. Cresswell
Small angle X-ray scattering (SAXS) was used to characterize the line cross section of nanoline gratings fabricated using electron beam lithography (EBL) patterning followed by anisotropic wet etching into silicon single crystal. SAXS results at normal

Characterization of the Photoacid Diffusion Length

February 27, 2009
Author(s)
Shuhui Kang, Vivek M. Prabhu, Wen-Li Wu, Eric K. Lin, Kwang-Woo Choi, Manish Chandhok, Todd Younkin, Wang Yueh
The photoacid diffusion length is a critical issue for EUV photoresists and photolithography because it governs critical dimension (CD), line-edge-roughness (LER) and line-width-roughness (LWR). This paper provides an approach to characterize the photoacid

The molecular basis of mesophase ordering in a thiophene-based copolymer

February 18, 2009
Author(s)
Dean M. DeLongchamp, Regis J. Kline, Youngsuk Jung, Eric K. Lin, Daniel A. Fischer, David J. Gundlach, Andrew Moad, Lee J. Richter, Michael F. Toney, Martin Heeney, Iain McCulloch
The carrier mobility of poly(2,5-bis(3-alkylthiophen-2-yl) thieno[3,2-b]thiophene) semiconductors can be substantially enhanced after heating through a thermotropic mesophase transition, which causes a significant improvement in thin film structural order

Well-Ordered Polymer Melts with 5 nm Lamellar Domains from Blends of a Disordered Block Copolymer and a Selectively Associating Homopolymer of Low or High Molar Mass

October 16, 2008
Author(s)
Vijay Tirumala, August W. Bosse, Eric K. Lin, Vikram Daga, Alvin Romang, Jan Ilavsky, J J. Watkins
The use of short chain block copolymer melts as nanostructured templates for sub-10 nm domains is often limited by their low segregation strength (N). Since increasing molar mass to strengthen segregation also increases the interdomain spacing of block

A Molecular Model for Toughening in Double-Network Hydrogels

June 18, 2008
Author(s)
Vijay Tirumala, Sanghun Lee, Taiki Tominaga, Eric K. Lin, Jian P. Gong, Paul D. Butler, Wen-Li Wu
A molecular mechanism is proposed for the toughness enhancement observed in double network (DN) hydrogels prepared from poly (2 acrylamido, 2-methyl, 1-propanesulfonicacid) (PAMPS) polyelectrolyte network and polyacrylamide (PAAm) linear polymer. It is an

The Impact of the Dielectric / Semiconductor Interface on Microstructure and Charge Carrier Transport in High-Performance Polythiophene Transistors

May 14, 2008
Author(s)
Youngsuk Jung, Regis J. Kline, Eric K. Lin, Daniel A. Fischer, Michael F. Toney, Martin Heeney, Iain McCulloch, Dean M. DeLongchamp
The performance of organic field-effect transistors (OFETs) significantly depends on the properties of the interface between the semiconductor and gate dielectric. Here, we study the impact of chemically modified and morphologically controlled dielectrics

Self-Sealing Nanoporous Low-k Dielectric Patterns Created by Nanoimprint Lithography

April 15, 2008
Author(s)
Hyun Wook Ro, H Peng, Ken-ich Nihara, Hae-Jeong Lee, Eric K. Lin, Alamgir Karim, D Gidley, Hiropshi Jinai, Do Y. Yoon, Christopher L. Soles
In this letter we describe how highly porous nanostructures can be directly printed into a poly(methylsilsequioxane) (PMSQ)-based organosilicate film, with high pattern fidelity, and develop the measurement infrastructure to quantitatively evaluate the

Characterizing Pattern Structures Using X-Ray Reflectivity

March 28, 2008
Author(s)
Hae-Jeong Lee, Christopher L. Soles, Hyun Wook Ro, Shuhui Kang, Eric K. Lin, Alamgir Karim, Wen-Li Wu
Specular X-ray reflectivity (SXR) can be used, in the limit of the effective medium approximation (EMA), as a high-resolution shape metrology for periodic patterns on a planar substrate. The EMA means that the density of the solid pattern and the space

Line Width Roughness and Cross Sectional Measurements of Sub-50 nm Structures with CD-SAXS and CD-SEM

March 24, 2008
Author(s)
Chengqing C. Wang, Ronald L. Jones, Kwang-Woo Choi, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, James S. Clarke, John S. Villarrubia, Benjamin Bunday
Critical dimension small angle x-ray scattering (CD-SAXS) is a measurement platform which is capable of measuring the average cross section and sidewall roughness in patterns ranging from (10 to 500) nm in pitch with sub nm precision. These capabilities

Structure and Dynamics in Multicomponent Polyelectrolyte Solutions

March 11, 2008
Author(s)
Sanghun Lee, Vijay Tirumala, Michihiro Nagao, Taiki Tominaga, Eric K. Lin, Jian P. Gong, Wen-Li Wu
Double-network hydrogels (DN-gels) prepared from the combination of a moderately crosslinked anionic polyelectrolyte (poly(2-acrylamido-2-methyl-1-propanesulfonic acid, PAMPS) and an uncrosslinked linear polymer (polyacrylamide, PAAm) solution show strong

The Effect of Interfacial Roughness on the Thin Film Morphology and Charge Transport of High-Performance Polythiophenes

March 11, 2008
Author(s)
Y S. Jung, Regis J. Kline, Daniel A. Fischer, Eric K. Lin, Martin Heeney, Iain McCulloch, Dean M. DeLongchamp
We control and vary the roughness of a dielectric upon which a high-performance polymer semiconductor, poly(2,5-bis(3-alkylthiophen-2-yl)thieno[3,2-b]thiophene) (pBTTT) is cast, to determine the effects of roughness on thin-film microstructure and the

Thermodynamic Interactions in Double-Network Hydrogels

March 11, 2008
Author(s)
Taiki Tominaga, Vijay Tirumala, Sanghun Lee, Eric K. Lin, Jian P. Gong, Wen-Li Wu
Double-network hydrogels (DN-gels) prepared from the combination of a moderately crosslinked anionic polyelectrolyte and an uncrosslinked linear polymer solution exhibit mechanical properties such as fracture toughness that are intriguingly superior to

Single cantilever peel test for analysis of adhesion strength in nanotransfer printing

February 17, 2008
Author(s)
Deuk Y. Lee, Gottlieb Oehrlein, Daniel R. Hines, Jiong Liu, Jun Y. Chung, Christopher M. Stafford, Christopher L. Soles, Eric K. Lin
Nanotransfer printing (NTP) has attracted much attention as a method for fabricating nanoscale structures using materials that are not generally compatible with conventional lithographic techniques. For NTP of a polymer film to a polymer substrate, thermal