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Displaying 151 - 175 of 212

Aperture Proximity Effects in High Heat Flux Sensors Calibration

November 1, 1998
Author(s)
A V. Murthy, Benjamin K. Tsai, Robert D. Saunders
In transfer calibration of heat flux sensors, a correction for the irradiance distribution across the sensing area may be required when the sensing areas of reference and test sensors are different. A method to calculate this correction using well known

Evaluation of Uncertainties in Fundamental Radiometric Measurements

October 1, 1998
Author(s)
Benjamin K. Tsai, Bettye C. Johnson
The uncertainty of measurements is critical in furthering the development of radiometric science and acquiring an increased understanding of its principles. Proper analysis of measurement uncertainties provides an indication of how well the measurements

High Heat Flux Sensors Calibration Using Blackbody Radiation

August 1, 1998
Author(s)
A V. Murthy, Benjamin K. Tsai, Robert D. Saunders
This paper deals with the radiative calibration aspects of high heat flux sensors using blackbody radiation. Several heat flux sensors were calibrated up to 50kW/m 2 in the last two years using a 25 - mm diameter aperture variable temperature blackbody and

RTP Calibration Wafer Using Thin-Film Thermocouples

April 1, 1998
Author(s)
Kenneth G. Kreider, D P. DeWitt, Benjamin K. Tsai, Francis J. Lovas, David W. Allen
Rapid thermal processing (RTP) is a key technology for the cluster tool, single wafer manufacturing approach that is used to produce integrated circuits at lower cost with reduced line widths and thermal budgets. However, various problems associated with