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ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling

Published

Author(s)

Benjamin K. Tsai, D P. DeWitt
Proceedings Title
7^uth^ Intl Conf. Advanced Thermal Processing of Semiconductors
Conference Dates
June 13-16, 1999
Conference Location
Colorado Springs, CO
Conference Title
Proc. 7^uth^ Intl Conf. Advanced Thermal Processing of Semiconductors

Citation

Tsai, B. and DeWitt, D. (1999), ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling, 7^uth^ Intl Conf. Advanced Thermal Processing of Semiconductors , Colorado Springs, CO (Accessed March 4, 2024)
Created January 1, 1999, Updated February 17, 2017