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ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling
Published
Author(s)
Benjamin K. Tsai, D P. DeWitt
Proceedings Title
7^uth^ Intl Conf. Advanced Thermal Processing of Semiconductors
Conference Dates
June 13-16, 1999
Conference Location
Colorado Springs, CO
Conference Title
Proc. 7^uth^ Intl Conf. Advanced Thermal Processing of Semiconductors
Pub Type
Conferences
Citation
Tsai, B.
and DeWitt, D.
(1999),
ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling, 7^uth^ Intl Conf. Advanced Thermal Processing of Semiconductors , Colorado Springs, CO
(Accessed October 8, 2025)