U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications by:

Search Title, Abstract, Conference, Citation, Keyword or Author
Displaying 26 - 50 of 185

A Stiffness Model for Control and Analysis of a MEMS Hexapod Nanopositioner

July 9, 2014
Author(s)
Hongliang Shi, Hai-Jun Su, Nicholas Dagalakis
This paper presents a stiffness based kinematic model for analysis and control of a MEMS flexure-based hexapod nanopositioner that was previously built by the National Institute of Standards and Technology (NIST). This nanopositioner is capable of

Design of MEMS based three-axis motion stage by incorporating a nested structure

June 5, 2014
Author(s)
Yong Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta
A new design of three degrees-of-freedom (DOFs) translational motion stage (XYZ-stage) is presented in this paper. This XYZ-stage is based on Micro-electro-mechanical systems (MEMS) and designed by combining three existing 1-DOF motion stages through a

Microelectromechanical systems based Stewart platform with sub-nano resolution

December 3, 2012
Author(s)
Seung Ho Yang, Yong Sik Kim, Jae M. Yoo, Nicholas G. Dagalakis
Currently difficulties exist in the fabrication of microelectromechanical systems (MEMS) in the form of Stewart platforms. The macroscale positioning technology, such as universal joints, ball and roller bearings and commercial actuators, used for building

Automated Multiprobe Microassembly using Vision Feedback

October 5, 2012
Author(s)
John D. Wason, John T. Wen, Jason J. Gorman, Nicholas Dagalakis
This paper describes the algorithm development and experimental results of a vision-guided multi-probe microassembly system. The key focus is to develop the capabilities required for the construction of three dimensional (3D) structures using only planar

A high-bandwidth electromagnetic MEMS motion stage for scanning applications

August 23, 2012
Author(s)
Young M. Choi, Nicholas G. Dagalakis, Jason J. Gorman, Seung Ho Yang, Yong Sik Kim, Jae M. Yoo
This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as

Kinematic Modeling and Calibration of a Flexure Based Hexapod Nanopositioner

August 21, 2012
Author(s)
Hongliang Shi, Hai-Jun Su, Nicholas Dagalakis, John A. Kramar
This paper covers the kinematic modeling of a flexure-based, hexapod nanopositioner and a new method of calibration for this type of nanopositioner. This six degrees of freedom tri-stage nanopositioner can generate small displacement, high-resolution

Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures

August 15, 2012
Author(s)
Yong Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta
This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 Degree

Displacement Sensor for Detecting Sub-micrometer Motion

July 6, 2012
Author(s)
Svetlana Avramov-Zamurovic1, Jae M. Yoo, Nicholas Dagalakis, Rae Duk Lee
This paper describes the design of a nano displacement sensor that detects the presence of a moving platform by using fringing electric field. Its electrodes are commercially prefabricated Teflon insulated wires. This solution provides for excellent

Embedded Capacitive Displacement Sensor for Nanopositioning Applications

July 1, 2011
Author(s)
Svetlana Avramov-Zamurovic1, Nicholas Dagalakis, Rae Duk Lee, Jae M. Yoo, Seung H. Yang
The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. The paper presents the design, fabrication process and testing of a capacitance based displacement sensor