Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation



Yong Sik Kim, Jae M. Yoo, Seung Ho Yang, Young M. Choi, Nicholas G. Dagalakis, Satyandra K. Gupta


In micro-electro-mechanical systems (MEMS) it is difficult to obtain large range of motion with small coupled error. This limitation was overcome by designing and fabricating a nested structure as a serial kinematic mechanism (SKM). In this paper, a MEMS based XY stage is reported for multi-finger manipulation application. The SKM MEMS XY stage is implemented by embedding a single degree-of-freedom (DOF) stage into another single DOF stage. The proposed MEMS XY stage is fabricated by deep reactive ion etching (DRIE) from both sides of a silicon-on-insulator (SOI) wafer. This SKM MEMS stage has a capability to generate more than 50 μm displacements along each X and Y axis. This nested structure also suppressed the coupling motion error to 0.6% of the original actuation displacement. For the demonstration on the micro-particle manipulation, a 15 μm sized polypropylene particle is manipulated and rotated by operating two individual fingers attached to proposed MEMS stages.
Journal of Micromechanic and Microengineering


XY-stage, coordinated manipulation, nested structure, a serial kinematic mechanism


, Y. , Yoo, J. , , S. , Choi, Y. , Dagalakis, N. and Gupta, S. (2012), Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation, Journal of Micromechanic and Microengineering, [online], (Accessed June 18, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created August 29, 2012, Updated February 19, 2017