TY  - JOUR
AU  - Yong
AU  - Jae Yoo
AU  - Seung
AU  - Young Choi
AU  - Nicholas Dagalakis
AU  - Satyandra Gupta
C2  - Journal of Micromechanic and Microengineering
DA  - 2012-08-29
LA  - en
M1  - 22
PB  - Journal of Micromechanic and Microengineering
PY  - 2012
TI  - Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911710
ER  -