@article{14701, author = {Yong and Jae Yoo and Seung and Young Choi and Nicholas Dagalakis and Satyandra Gupta}, title = {Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation}, year = {2012}, number = {22}, month = {2012-08-29}, publisher = {Journal of Micromechanic and Microengineering}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911710}, language = {en}, }