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Displacement Sensor for Detecting Sub-micrometer Motion

Published

Author(s)

Svetlana Avramov-Zamurovic1, Jae M. Yoo, Nicholas Dagalakis, Rae Duk Lee

Abstract

This paper describes the design of a nano displacement sensor that detects the presence of a moving platform by using fringing electric field. Its electrodes are commercially prefabricated Teflon insulated wires. This solution provides for excellent insulation between the sensor electrodes and allows us to use high voltage to drive a Capacitance Bridge, thus achieving better resolution in measuring the sensor capacitance. The size of the wires explored in the paper follows standard American wire gauge AWG. The smallest diameter of a bare conductor is of the order of 25 μm permitting us to solder the coaxial cable connectors from the Capacitance Bridge to the sensor electrodes. This approach achieves good connectivity and reduces the noise level.
Proceedings Title
Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012)
Conference Dates
July 1-6, 2012
Conference Location
Washington, DC, US
Conference Title
Precision Electromagnetic Measurements (CPEM 2012)

Keywords

Nanopositioning, Fringing Electric Field, Capacitance Sensor

Citation

Avramov-Zamurovic1, S. , Yoo, J. , Dagalakis, N. and Lee, R. (2012), Displacement Sensor for Detecting Sub-micrometer Motion, Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012), Washington, DC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910510 (Accessed March 3, 2024)
Created July 5, 2012, Updated October 12, 2021