TY - CONF AU - Svetlana Avramov-Zamurovic1 AU - Jae Yoo AU - Nicholas Dagalakis AU - Rae Lee C2 - Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012), Washington, DC, US DA - 2012-07-06 00:07:00 LA - en PB - Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012), Washington, DC, US PY - 2012 TI - Displacement Sensor for Detecting Sub-micrometer Motion UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910510 ER -