@conference{829061,
  author = {Svetlana Avramov-Zamurovic1 and Jae Yoo and Nicholas Dagalakis and Rae Lee},
  title = {Displacement Sensor for Detecting Sub-micrometer Motion},
  year = {2012},
  month = {2012-07-06 00:07:00},
  publisher = {Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012), Washington, DC, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910510},
  language = {en},
}