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Microelectromechanical systems based Stewart platform with sub-nano resolution



Seung Ho Yang, Yong Sik Kim, Jae M. Yoo, Nicholas G. Dagalakis


Currently difficulties exist in the fabrication of microelectromechanical systems (MEMS) in the form of Stewart platforms. The macroscale positioning technology, such as universal joints, ball and roller bearings and commercial actuators, used for building the macro Stewart platforms can not be easily fit into MEMS versions of these machines. In this paper, we report that these difficulties were successfully overcome at the National Institute of Standards and Technology (NIST). A prototype of NIST's MEMS-based Stewart platform showed successful six degree-of-freedom kinematic capability with sub-nano-scale resolution. This MEMS Stewart platform can be adopted as a precision stage for sub nano-scale applications, such as the atomic force microscope (AFM) and manipulation of molecules.
Applied Physics Letters


MEMS, Stewart platform, sub-nano resolution


, S. , , Y. , Yoo, J. and Dagalakis, N. (2012), Microelectromechanical systems based Stewart platform with sub-nano resolution, Applied Physics Letters (Accessed April 15, 2024)
Created December 3, 2012, Updated February 19, 2017