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Embedded Capacitive Displacement Sensor for Nanopositioning Applications

Published

Author(s)

Svetlana Avramov-Zamurovic1, Nicholas G. Dagalakis, Rae Duk Lee, Jae M. Yoo, Seung Ho Yang

Abstract

The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. The paper presents the design, fabrication process and testing of a capacitance based displacement sensor. Nanopositioner application required active sensing area dimensions to be hundreds of micrometers making it necessary to develop sensor electrodes that are few micrometers in size. The advantages of the presented sensor are its noninvasive method and very low voltage necessary for signal conditioning. Initial results suggest good linearity and sensitivity of 0.001 pF/µm permitting reliable displacement resolution at the order of 100 nm.
Citation
IEEE Transactions on Instrumentation and Measurement
Volume
60
Issue
7

Keywords

capacitive sensor, displacement sensor, nanopositioner
Created July 1, 2011, Updated February 19, 2017