Embedded Capacitive Displacement Sensor for Nanopositioning Applications
Svetlana Avramov-Zamurovic1, Nicholas G. Dagalakis, Rae Duk Lee, Jae M. Yoo, Seung Ho Yang
The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. The paper presents the design, fabrication process and testing of a capacitance based displacement sensor. Nanopositioner application required active sensing area dimensions to be hundreds of micrometers making it necessary to develop sensor electrodes that are few micrometers in size. The advantages of the presented sensor are its noninvasive method and very low voltage necessary for signal conditioning. Initial results suggest good linearity and sensitivity of 0.001 pF/µm permitting reliable displacement resolution at the order of 100 nm.
IEEE Transactions on Instrumentation and Measurement