TY  - JOUR
AU  - Svetlana Avramov-Zamurovic1
AU  - Nicholas Dagalakis
AU  - Rae Lee
AU  - Jae Yoo
AU  - Seung Yang
C2  - IEEE Transactions on Instrumentation and Measurement
DA  - 2011-07-01 00:07:00
LA  - en
M1  - 60
PB  - IEEE Transactions on Instrumentation and Measurement
PY  - 2011
TI  - Embedded Capacitive Displacement Sensor for Nanopositioning Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907248
ER  -