@article{787536,
  author = {Svetlana Avramov-Zamurovic1 and Nicholas Dagalakis and Rae Lee and Jae Yoo and Seung Yang},
  title = {Embedded Capacitive Displacement Sensor for Nanopositioning Applications},
  year = {2011},
  number = {60},
  month = {2011-07-01 00:07:00},
  publisher = {IEEE Transactions on Instrumentation and Measurement},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907248},
  language = {en},
}