Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Design of MEMS based three-axis motion stage by incorporating a nested structure



Yong Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta


A new design of three degrees-of-freedom (DOFs) translational motion stage (XYZ-stage) is presented in this paper. This XYZ-stage is based on Micro-electro-mechanical systems (MEMS) and designed by combining three existing 1-DOF motion stages through a nested structure. By utilizing the previously developed stages, this approach can reduce the effort for the design and analysis steps and ensure reasonable reliability. For successful implementation, electrical connection to the engaged stages, electrical isolation among them, additional floating frames are introduced based on chosen 1-DOF motion stages. With these features, the presented XYZ-stage is successfully fabricated and demonstrates the range of motion of 53.98 µm, 49.15 µm and 22.91 µm along X, Y, and Z axes, respectively. The coupled motion errors among the engaged stages can be reduced to be less than 1 µm with the proposed compensation method.
Journal of Micromechanics and Microengineering


Nanopositioning, MEMS, 3 DOF, nested structure


, Y. , Dagalakis, N. and Gupta, S. (2014), Design of MEMS based three-axis motion stage by incorporating a nested structure, Journal of Micromechanics and Microengineering, [online], (Accessed April 23, 2024)
Created June 5, 2014, Updated February 19, 2017