TY  - JOUR
AU  - Yong
AU  - Nicholas Dagalakis
AU  - Satyandra Gupta
C2  - Journal of Micromechanics and Microengineering
DA  - 2014-06-05
LA  - en
M1  - 24
PB  - Journal of Micromechanics and Microengineering
PY  - 2014
TI  - Design of MEMS based three-axis motion stage by incorporating a nested structure
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915777
ER  -