@article{16486,
  author = {Yong and Nicholas Dagalakis and Satyandra Gupta},
  title = {Design of MEMS based three-axis motion stage by incorporating a nested structure},
  year = {2014},
  number = {24},
  month = {2014-06-05},
  publisher = {Journal of Micromechanics and Microengineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915777},
  language = {en},
}