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Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

Published

Author(s)

Yong Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta

Abstract

Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage is presented based on bulk micromachining technologies. This stage is electro thermally actuated for out-of-plane motion by incorporating beams with step features. The fabricated motion stage has demonstrated displacements of 85 um with 0.4 um/mA rates and generated up to 11.8 mN forces with stiffness of 138.8 N/m. These properties obtained from the presented stage are in a similar level to in-plane motion stages which improve its usefulness when used in collaboration with in-plane motion stages.
Citation
Journal of Micromechanic and Microengineering
Volume
23

Keywords

MEMS, precision motion stage, out-of-plane, Silicon-on-insulator, bulk micromachining

Citation

, Y. , Dagalakis, N. and Gupta, S. (2013), Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features, Journal of Micromechanic and Microengineering, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913234 (Accessed December 4, 2023)
Created March 26, 2013, Updated February 19, 2017