@article{14706,
  author = {Yong and Nicholas Dagalakis and Satyandra Gupta},
  title = {Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features},
  year = {2013},
  number = {23},
  month = {2013-03-26},
  publisher = {Journal of Micromechanic and Microengineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913234},
  language = {en},
}