TY  - JOUR
AU  - Yong
AU  - Nicholas Dagalakis
AU  - Satyandra Gupta
C2  - Journal of Micromechanic and Microengineering
DA  - 2013-03-26
LA  - en
M1  - 23
PB  - Journal of Micromechanic and Microengineering
PY  - 2013
TI  - Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913234
ER  -